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Nanofabrication: Principles, Capabilities and Limits Softcover reprint of the original 2nd ed. 2017 edition
Zheng Cui
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Nanofabrication: Principles, Capabilities and Limits Softcover reprint of the original 2nd ed. 2017 edition
Zheng Cui
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale.
432 pages, 45 Tables, color; 50 Illustrations, color; 266 Illustrations, black and white; XVII, 432
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 20, 2018 |
| ISBN13 | 9783319818757 |
| Publishers | Springer International Publishing AG |
| Pages | 432 |
| Dimensions | 680 g |
| Language | German |
