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Nanofabrication: Principles, Capabilities and Limits 2nd ed. 2017 edition
Zheng Cui
Nanofabrication: Principles, Capabilities and Limits 2nd ed. 2017 edition
Zheng Cui
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale.
449 pages, 266 black & white illustrations, 50 colour illustrations, 45 colour tables, biography
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | September 12, 2016 |
ISBN13 | 9783319393599 |
Publishers | Springer International Publishing AG |
Pages | 432 |
Dimensions | 155 × 235 × 25 mm · 807 g |
Language | German |