Semiconductor Micromachining (Techniques and Industrial Applications)

S a Campbell

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A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.

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406 pages, 141 illustrations, 34 graphs, 18 tables

Media Bøger     Hardcover Book   (Bog med hård ryg og stift omslag)
Released Storbritannien, 08/05-1998
ISBN13 9780471966821
Publisher John Wiley and Sons Ltd
Pages 406
Dimensions 237 × 163 × 29 mm
Weight 776 gram
Language English
Editor Campbell, S. A.
Editor Lewerenz, H. J.