Semiconductor Micromachining: Techniques and Industrial Applications - S a Campbell - Books - John Wiley & Sons Inc - 9780471966821 - May 8, 1998
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

S a Campbell

Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition

A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.


406 pages, 141 illustrations, 34 graphs, 18 tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released USA, May 8, 1998
ISBN13 9780471966821
Publishers John Wiley & Sons Inc
Pages 408
Dimensions 163 × 237 × 29 mm   ·   775 g
Language English  
Editor Campbell, S. A.
Editor Lewerenz, H. J.