Semiconductor Micromachining (Techniques and Industrial Applications)

S a Campbell

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A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.


406 pages, 141 illustrations, 34 graphs, 18 tables

Media Bøger     Hardcover Book   (Bog med hård ryg og stift omslag)
Released Storbritannien, 08/05-1998
ISBN13 9780471966821
Publisher John Wiley and Sons Ltd
Pages 406
Dimensions 237 × 163 × 29 mm
Weight 776 gram
Language English
Editor Campbell, S. A.
Editor Lewerenz, H. J.